QML-CI Inline System Compact


The QML-CI Inline System Compact from SCI Automation Pte. Ltd. is a compact inline plasma cleaning system designed for semiconductor and automotive products handled on boats.

QML-CI is equipped with a conveyor and an indexer that ensure optimal handling of your products with no jams or damage.

QML-CI’s configuration allows the option of full traceability of the processed boats.


  • Two universal interface conveyors complying to the SMEMA standard for the upstream and downstream systems. The integration in the line is assured via SMEMA 1.2 protocol.
  • A 13.56 MHz RF system inclusive of an automatic tuning network
  • Two mass flow controlled gas input lines
  • A dry vacuum pump contained in the body of the machine
  • A high precision capacitive pressure gauge
  • An all-aluminum chamber with no welded joints, nickel-coated for maximum performance
  • Two automatic doors
  • A PLC controller with an LCD touch screen user interface

Industries Served / Applications :

Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication