QML-CI Inline System Compact
The QML-CI Inline System Compact from SCI Automation Pte. Ltd. is a compact inline plasma cleaning system designed for semiconductor and automotive products handled on boats.
QML-CI is equipped with a conveyor and an indexer that ensure optimal handling of your products with no jams or damage.
QML-CI’s configuration allows the option of full traceability of the processed boats.
- Two universal interface conveyors complying to the SMEMA standard for the upstream and downstream systems. The integration in the line is assured via SMEMA 1.2 protocol.
- A 13.56 MHz RF system inclusive of an automatic tuning network
- Two mass flow controlled gas input lines
- A dry vacuum pump contained in the body of the machine
- A high precision capacitive pressure gauge
- An all-aluminum chamber with no welded joints, nickel-coated for maximum performance
- Two automatic doors
- A PLC controller with an LCD touch screen user interface
Industries Served / Applications :
Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication