JUNO Flexible Batch System Multiple Hybrid Substreate
The JUNO Flexible Batch System / Multiple Hybrid Substreate from SCI Automation Pte. Ltd. is a standalone batch plasma cleaning system.
Juno’s chamber can accommodate a variable number of shelves, this allows the flexibility of handling multiple hybrid substrates.
The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.
- A 13.56 MHz RF system inclusive of an automatic tuning network
- Two mass flow controlled gas input lines
- An alternating gas and vacuum supply for best plasma homogeneity throughout the chamber
- A dry vacuum pump contained in the body of the machine
- A high precision capacitive pressure gauge
- An all-aluminum chamber nickel-coated for maximum performance
- A manual door
- A PC controller with an LCD touch screen user interface.
Industries Served / Applications :
Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication