Description:

The JUNO Flexible Batch System / Multiple Hybrid Substreate from SCI Automation Pte. Ltd. is a standalone batch plasma cleaning system.

Juno’s chamber can accommodate a variable number of shelves, this allows the flexibility of handling multiple hybrid substrates.

The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.

Features:

• A 13.56 MHz RF system inclusive of an automatic tuning network
• Two mass flow controlled gas input lines
• An alternating gas and vacuum supply for best plasma homogeneity throughout the chamber
• A dry vacuum pump contained in the body of the machine
• A high precision capacitive pressure gauge
• An all-aluminum chamber nickel-coated for maximum performance
• A manual door
• A PC controller with an LCD touch screen user interface.

Industries Served / Applications :

Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication