JUNO Flexible Batch System Multiple Hybrid Substreate


The JUNO Flexible Batch System / Multiple Hybrid Substreate from SCI Automation Pte. Ltd. is a standalone batch plasma cleaning system.

Juno’s chamber can accommodate a variable number of shelves, this allows the flexibility of handling multiple hybrid substrates.

The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.


  • A 13.56 MHz RF system inclusive of an automatic tuning network
  • Two mass flow controlled gas input lines
  • An alternating gas and vacuum supply for best plasma homogeneity throughout the chamber
  • A dry vacuum pump contained in the body of the machine
  • A high precision capacitive pressure gauge
  • An all-aluminum chamber nickel-coated for maximum performance
  • A manual door
  • A PC controller with an LCD touch screen user interface.

Industries Served / Applications :

Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication