AEON Standalone Compact Batch Plasma


The AEON Standalone Compact Batch Plasma from SCI Automation Pte. Ltd. is a compact standalone batch plasma cleaning system. It includes all the subassemblies necessary to deliver excellent cleaning and surface modification results. The features contained in this system allow reliable and repeatable cycling of the plasma process to guarantee a smooth 24/7 operation.

Aeon’s strength is its flexibility. This system comes with different configurations to best adapt to your plasma process’ needs.


  • A 50 kHz or 56 MHz RF system
  • One mass flow controlled gas input line
  • A high precision capacitive pressure gauge
  • An all-aluminum chamber, nickel-coated for maximum performance
  • A manual door
  • A PLC controller with an LCD touch screen user interface

Industries Served / Applications : 

Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication