ARES Large Surface Matrix Trays Batch System


The Ares Large Surface Matrix Trays Batch System from SCI Automation Pte. Ltd. is a standalone batch plasma cleaning system, designed for large surface substrates or matrix trays.

Ares’ chamber is specially designed to handle high power conditions required when performing etching processes.

The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.


• A 13.56 MHz RF system inclusive of an automatic tuning network
• Two mass flow controlled gas input lines
• A dry vacuum pump contained in the body of the machine
• A high precision capacitive pressure gauge
• An all-aluminum chamber nickel-coated for maximum performance
• An automatic door
• A PC controller with an LCD touch screen user interface.

Industries Served / Applications :

Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication