PHILO Standalone Compact Batch Plasma
Description:
The PHILO Standalone Compact Batch Plasma from SCI Automation Pte. Ltd. is a compact standalone batch plasma cleaning system. Philo’s chamber contains an automatic tray in which your products can be easily placed to be properly processed. This assures cleaning repeatability and a straightforward operation. The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.
Features:
- A 13.56 MHz RF system inclusive of an automatic tuning network
- Two mass flow controlled gas input lines
- An oil vacuum pump contained in the body of the machine
- A high precision capacitive pressure gauge
- An all-aluminum chamber with no welded joints, nickel-coated for maximum performance
- An automatic door
- A PC controller with an LCD touch screen user interface.
Industries Served / Applications :
Aerospace, Defence, Military, Automotive, Industrial Automation, Medical, Solar Photovoltaic, Railways, E-Mobility, Renewable Energy, Telecommunication